Development of a Piezoelectric Vacuum Sensing Component for a Wide Pressure Range
In this study, we develop a clamped–clamped beam-type piezoelectric vacuum pressure sensing element.The clamped–clamped piezoelectric beam is composed of a PZT layer and a copper substrate.A pair of electrodes is set near each end.An input voltage is applied to a pair of electrodes to vibrate the piezoelectric beam, product and the output volta